HIGH-SENSITIVITY QUASISIMULTANEOUS SECONDARY NEUTRAL, SECONDARY ION, AND RESIDUAL-GAS MASS-SPECTROMETRY BY A NEW ELECTRON-IMPACT POSTIONIZER

被引：8

作者：

LIPINSKY, D

JEDE, R

TUMPNER, J

GANSCHOW, O

BENNINGHOVEN, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.572921

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2035 / 2036

页数：2

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GANSCHOW, O ;

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[3]

LIPINSKY D, 1984, THESIS MUNSTER

[4] A MASS SPECTROMETER FOR ISOTOPE AND GAS ANALYSIS [J].

NIER, AO .

SANDER, P ;

KAISER, U ;

JEDE, R ;

LIPINSKY, D ;

GANSCHOW, O ;

BENNINGHOVEN, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05) :1946-1954

[6]

WERNER HW, 1978, ADV MASS SPECTROME A, V7, P804