IMPURITY-FREE LAYER DISORDERING IN P-I-N AND N-I-P ALGAAS-GAAS MULTIPLE-QUANTUM-WELL DEVICE STRUCTURES - THE FERMI-LEVEL EFFECT REVISITED

被引:7
作者
SESHADRI, S [1 ]
GUIDO, LJ [1 ]
MITEV, P [1 ]
机构
[1] YALE UNIV,CTR MICROELECTR MAT & STRUCT,NEW HAVEN,CT 06520
关键词
D O I
10.1063/1.114548
中图分类号
O59 [应用物理学];
学科分类号
摘要
Spatially resolved values of the Al-Ga interdiffusion coefficient for p-i-n and n-i-p AlGaAs-GaAs device structures are found to be nearly identical in magnitude, but to vary with position by a factor of 2 across a 1 mu m thick multiple quantum well active region. These observations are in marked contrast with theoretical predictions given that the Fermi level to valence-band energy separation changes by 0.7 eV across the intrinsic region and suggest that impurity-free layer disordering does not provide the necessary uniformity in energy shift for photonic integrated circuit fabrication in its present state of development. (C) 1995 American Institute of Physics.
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页码:497 / 499
页数:3
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