SELECTIVE (PHOTO)ELECTROCHEMICAL ETCHING OF SEMICONDUCTOR SURFACES

被引：37

作者：

TENNE, R

HODES, G

机构：

来源：

SURFACE SCIENCE | 1983年 / 135卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(83)90236-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：453 / 478

页数：26

共 47 条

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