INFLUENCE OF EXPOSURE TO AN ATMOSPHERE OF HIGH RELATIVE-HUMIDITY ON TRIBOLOGICAL PROPERTIES OF DIAMONDLIKE CARBON-FILMS

被引:46
作者
KOKAKU, Y
KITOH, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词
D O I
10.1116/1.575934
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:2311 / 2314
页数:4
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