EARLY STAGES OF GROWTH OF GAAS ON SI OBSERVED BY SCANNING TUNNELING MICROSCOPY

被引:21
作者
BIEGELSEN, DK
BRINGANS, RD
NORTHRUP, JE
SWARTZ, LE
机构
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D O I
10.1063/1.103864
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using a system coupling molecular beam deposition, scanning tunneling microscopy, and Auger spectroscopy in a connected ultrahigh-vacuum environment, we have observed the initial stages of GaAs growth on vicinal Si(100), including As termination, ordered Ga overlayers, and subsequent competition between two- and three-dimensional structures.
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页码:2419 / 2421
页数:3
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