SELF-CLEANING LANGMUIR PROBE

被引:30
作者
AMATUCCI, WE [1 ]
KOEPKE, ME [1 ]
SHERIDAN, TE [1 ]
ALPORT, MJ [1 ]
CARROLL, JJ [1 ]
机构
[1] UNIV NATAL,DEPT PHYS,DURBAN,SOUTH AFRICA
关键词
D O I
10.1063/1.1144074
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A contamination-free Langmuir probe of novel design is described. Surface contaminants, which lead to erroneous evaluation of plasma parameters by distortion of the probe's current-voltage characteristic, are removed by the indirect heating of the probe tip with separate heating elements running parallel to the probe wire in multibore alumina tubing. This configuration minimizes magnetic field perturbations, while maintaining the compact profile and construction ease of an unheated probe. The design and operating characteristics of such a probe are reported. Temperatures at the probe tip, as measured by a subminiature thermocouple, can exceed 500-degrees-C. Experiments determining the effect of probe temperature, T(probe), on the characteristic have been performed in a Q-machine plasma (T(i) almost-equal-to T(e) almost-equal-to 0.2 eV). We find that for T(probe) < 250-degrees-C, the measured electron temperature is up to several times too large, indicating the presence of a eontamination layer. This contamination layer is removed for T(probe) greater-than-or-equal-to 300-degrees-C, and accurate electron temperatures are recovered.
引用
收藏
页码:1253 / 1256
页数:4
相关论文
共 18 条
[1]   HEATED LANGMUIR PROBE MEASUREMENTS OF REACTIVE DIRECT-CURRENT MAGNETRON PLASMAS [J].
BELL, BC ;
GLOCKER, DA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :2047-2050
[2]   ION DISTRIBUTION FUNCTIONS IN COLLISIONLESS SURFACE IONIZED PLASMAS [J].
BUZZI, JM ;
DOUCET, HJ ;
GRESILLON, D .
PHYSICS OF FLUIDS, 1970, 13 (12) :3041-+
[3]   THE EFFECT OF A-SI-H THIN-FILM LAYERS ON THE DETERMINATION OF PLASMA PARAMETERS IN AN ELECTROSTATIC DOUBLE-PROBE MEASUREMENT [J].
CHANG, JS ;
ONO, S ;
TEII, S .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (08) :1310-1315
[4]  
CHEN FF, 1965, PLASMA DIAGNOSTIC TE, P191
[5]   DIELECTRIC IMPURITIES AND SURFACE INSTABILITY IN LANGMUIR PROBE PLASMA MEASUREMENTS [J].
DARCY, RJ .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (10) :1391-1401
[6]   VERSATILE PLASMA PROBE [J].
HOLMES, JC ;
SZUSZCZEWICZ, EP .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1975, 46 (05) :592-598
[7]   ELECTROSTATIC ION-CYCLOTRON WAVE EXPERIMENTS IN THE WVU Q-MACHINE [J].
KOEPKE, ME ;
AMATUCCI, WE .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1992, 20 (06) :631-635
[8]   USE OF ELECTRIC PROBES IN SILANE RADIO-FREQUENCY DISCHARGES [J].
MOSBURG, ER ;
KERNS, RC ;
ABELSON, JR .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) :4916-4927
[9]  
MOTLEY RW, 1975, Q MACHINES, P30
[10]   INACCURACIES IN ELECTRON-DENSITY ESTIMATES DUE TO SURFACE CONTAMINATION OF LANGMUIR PROBES [J].
OYAMA, KI ;
HIRAO, K .
PLANETARY AND SPACE SCIENCE, 1976, 24 (01) :87-89