LASER-INDUCED FLUORESCENCE MEASUREMENT AND ANALYTICAL MODEL FOR THE REACTION PROBABILITY OF CF2 ON SI

被引：35

作者：

THOMAN, JW

SUZUKI, K

KABLE, SH

STEINFELD, JI

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 08期

关键词：

D O I：

10.1063/1.337110

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2775 / 2777

页数：3

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