DETECTION OF CF2 RADICALS IN A PLASMA-ETCHING REACTOR BY LASER-INDUCED FLUORESCENCE SPECTROSCOPY

被引：61

作者：

HARGIS, PJ

KUSHNER, MJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 40卷 / 09期

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D O I：

10.1063/1.93257

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：779 / 781

页数：3

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