THE ENERGY SPREAD OF IONS FROM GOLD LIQUID-METAL ION SOURCES AS A FUNCTION OF SOURCE PARAMETERS

被引：11

作者：

PAPADOPOULOS, S ^{[1
]}

BARR, D ^{[1
]}

BROWN, WL ^{[1
]}

WAGNER, A ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL DE PHYSIQUE | 1984年 / 45卷 / NC9期

关键词：

D O I：

10.1051/jphyscol:1984936

中图分类号：

学科分类号：

摘要：

引用

页码：217 / 222

页数：6

共 18 条

[11] HIGH-INTENSITY SCANNING ION PROBE WITH SUBMICROMETER SPOT SIZE [J].

SELIGER, RL ;

WARD, JW ;

WANG, V ;

KUBENA, RL .

APPLIED PHYSICS LETTERS, 1979, 34 (05) :310-312

[12]

SWANSON LW, 1980, J APPL PHYS, V51, P7

[13]

THOMPSON SP, 1982, J PHYS D, V15

[14] THE HYDRODYNAMICS OF LIQUID-METAL ION SOURCES [J].

WAGNER, A .

APPLIED PHYSICS LETTERS, 1982, 40 (05) :440-442

[15] DROPLET EMISSION IN LIQUID-METAL ION SOURCES [J].

WAGNER, A ;

VENKATESAN, T ;

PETROFF, PM ;

BARR, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1186-1189

[16] APPLICATIONS OF FOCUSED ION-BEAMS [J].

WAGNER, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :355-362

[17]

WAGNER A, 1983, 30TH INT FIELD EM S

[18] A MASS-SEPARATING FOCUSED-ION-BEAM SYSTEM FOR MASKLESS ION-IMPLANTATION [J].

WANG, V ;

WARD, JW ;

SELIGER, RL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1158-1163

← 1 2 →