MAYADAS-SHATZKES CONDUCTION IN NUCLEATION-GROWN RF SPUTTERED FILMS OF ALUMINUM

被引：33

作者：

TELLIER, C ^{[1
]}

TOSSER, A ^{[1
]}

机构：

[1] UNIV HAUTE NORMANDIE,UER SCI & TECH,ELECTR & AUTOM LAB,F-76077 LE HAVRE,FRANCE

来源：

关键词：

D O I：

10.1016/0040-6090(76)90185-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：207 / 214

页数：8

共 26 条

[1] ELECTRICAL AND STRUCTURAL-PROPERTIES OF THIN GOLD-FILMS OBTAINED BY VACUUM EVAPORATION AND SPUTTERING
ADAMOV, M
PEROVIC, B
NENADOVIC, T
[J]. THIN SOLID FILMS, 1974, 24 (01) : 89 - 100
[2] EXPERIMENTAL STUDY ON DIFFUSION OF CONDUCTION ELECTRONS USING SURFACE DEFECTS OF THIN GOLD FILMS
CHAUVINEAU, JP
PARISET, C
[J]. SURFACE SCIENCE, 1973, 36 (01) : 155 - 172
[3] ELECTRICAL RESISTIVITY OF THIN SINGLE-CRYSTAL GOLD FILMS
CHOPRA, KL
BOBB, LC
FRANCOMBE, MH
[J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (06) : 1699 - &
[4] ELECTRICAL CONDUCTION IN THIN CONTINUOUS FILMS
COUTTS, TJ
[J]. THIN SOLID FILMS, 1971, 7 (02) : 77 - &
[5] TEMPERATURE COEFFICIENT OF RESISTANCE IN THIN VANADIUM FILMS
JAIN, SC
CHANDER, R
[J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (11) : 5343 - &
[6] Laville Saint Martin B., 1969, Thin Solid Films, V4, P319, DOI 10.1016/0040-6090(69)90098-4
[7] LAVILLES.B, 1970, THIN SOLID FILMS, V6, P359, DOI 10.1016/0040-6090(70)90086-6
[8] LAVILLESAINTMAR.B, 1966, REV PHYS APPL, V1, P238
[9] LAVILLESAINTMAR.B, 1969, THESIS STRASBOURG
[10] LAVILLESTMARTIN B, 1970, THIN SOLID FILMS, V5, P169, DOI 10.1016/0040-6090(70)90075-1