EXCIMER-LASER-INDUCED ABLATION OF THE HIGH-TC SUPERCONDUCTOR BI-CA-SR-CU-O

被引：12

作者：

KULLMER, R

BAUERLE, D

机构：

[1] Johannes-Kepler-Univ, Linz, Austria, Johannes-Kepler-Univ, Linz, Austria

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 47卷 / 01期

关键词：

BISMUTH COMPOUNDS - Ablation - CERAMIC MATERIALS - Ablation - ETCHING - LASERS; EXCIMER;

D O I：

10.1007/BF00619707

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The ablation of ceramic Bi-Ca-Sr-Cu-P by XeCl-excimer-laser projection has been investigated. In both air and vacuum, etching commences at about 2. 4 J/cm**2 and then increases with fluence within the regime investigated ( phi APP 1STH 20 J/cm**2). At 10 J/cm**2 the respective etch rates are around 1 nu m/pulse and 1. 6 nu m/phase.

引用

页码：103 / 104

页数：2

共 13 条

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