TRANSPARENT AND CONDUCTIVE CADMIUM-TIN OXIDE-FILMS DEPOSITED BY ATOM BEAM SPUTTERING

被引:4
作者
NAKAZAWA, T
ITO, K
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 09期
关键词
D O I
10.1143/JJAP.27.1630
中图分类号
O59 [应用物理学];
学科分类号
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页码:1630 / 1634
页数:5
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