UV LIGHT-INDUCED DEPOSITION OF COPPER-FILMS

[1] PROJECTION PRINTING OF GOLD MICROPATTERNS BY PHOTOCHEMICAL DECOMPOSITION [J]. APPLIED PHYSICS LETTERS, 1986, 49 (18) : 1213 - 1215

[2] Recent advances in laser processing of microelectronic materials and devices [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (10) : S23 - S27

[3] COLE HS, 1988, LASER PROCESSES MICR, V88

[4] UV EXCIMER RADIATION FROM DIELECTRIC-BARRIER DISCHARGES [J]. APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1988, 46 (04): : 299 - 303

[5] ELIASSON B, 1988, EUROP PHOTOCHEM ASS, P29

[6] ELIASSON B, 1988, 9TH P INT C GAS DISC, P709

[7] ESROM H, 1988, IN PRESS MRS FALLMEE

[8] THE THERMAL-DECOMPOSITION OF PALLADIUM ACETATE [J]. JOURNAL OF THERMAL ANALYSIS, 1986, 31 (06): : 1231 - 1241

[9] LASER DIRECT-WRITE METALLIZATION IN THIN PALLADIUM ACETATE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (04) : 1628 - 1632

[1] PROJECTION PRINTING OF GOLD MICROPATTERNS BY PHOTOCHEMICAL DECOMPOSITION [J]. APPLIED PHYSICS LETTERS, 1986, 49 (18) : 1213 - 1215

[2] Recent advances in laser processing of microelectronic materials and devices [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (10) : S23 - S27

[3] COLE HS, 1988, LASER PROCESSES MICR, V88

[4] UV EXCIMER RADIATION FROM DIELECTRIC-BARRIER DISCHARGES [J]. APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1988, 46 (04): : 299 - 303

[5] ELIASSON B, 1988, EUROP PHOTOCHEM ASS, P29

[6] ELIASSON B, 1988, 9TH P INT C GAS DISC, P709

[7] ESROM H, 1988, IN PRESS MRS FALLMEE

[8] THE THERMAL-DECOMPOSITION OF PALLADIUM ACETATE [J]. JOURNAL OF THERMAL ANALYSIS, 1986, 31 (06): : 1231 - 1241

[9] LASER DIRECT-WRITE METALLIZATION IN THIN PALLADIUM ACETATE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (04) : 1628 - 1632