PROJECTION PRINTING OF GOLD MICROPATTERNS BY PHOTOCHEMICAL DECOMPOSITION

被引：36

作者：

BAUM, TH ^{[1
]}

MARINERO, EE ^{[1
]}

JONES, CR ^{[1
]}

机构：

[1] IBM CORP,DIV GEN TECHNOL,ENDICOTT,NY 13760

来源：

关键词：

D O I：

10.1063/1.97418

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1213 / 1215

页数：3

共 15 条

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[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (02) : 586 - 588
[10] LCVD OF COPPER - DEPOSITION RATES AND DEPOSIT SHAPES
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