SPUTTERING OF MOLECULAR GAS SOLIDS BY KEV IONS

被引：37

作者：

CHRISEY, DB ^{[1
]}

BORING, JW ^{[1
]}

PHIPPS, JA ^{[1
]}

JOHNSON, RE ^{[1
]}

BROWN, WL ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1016/0168-583X(86)90528-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：360 / 364

页数：5

共 23 条

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[3] ION-INDUCED CHEMISTRY IN CONDENSED GAS SOLIDS
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REIMANN, CT
GARRET, JW
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MARCANTONIO, KJ
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 707 - 711
[4] Brown W. L., 1984, Ion implantation and beam processing, P99
[5] ENERGY-DEPENDENCE OF THE EROSION OF H2O ICE FILMS BY H AND HE IONS
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EVATT, R
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[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 321 - 325
[6] ELECTRONIC SPUTTERING OF LOW-TEMPERATURE MOLECULAR-SOLIDS
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REIMANN, CT
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) : 307 - 314
[7] CHANG AF, 1978, J GEOPHYS RES, V83, P2596
[8] ELLEGAARD O, 1985, DIET, V2
[9] EVATT RW, 1980, THESIS U VIRGINIA
[10] CHEMICAL SPUTTERING BY KEV IONS
HARING, RA
KOLFSCHOTEN, AW
DEVRIES, AE
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) : 544 - 549