BEHAVIOR OF TITANIUM SUBLIMATION AND SPUTTER-ION PUMPS IN 10-11 TORR RANGE

被引：5

作者：

HALAMA, HJ ^{[1
]}

机构：

[1] BROOKHAVEN NATL LAB,UPTON,NY 11973

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569295

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：524 / 528

页数：5

共 16 条

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[8] CRYOSORPTION PUMPING FOR INTERSECTING STORAGE RINGS [J].

HALAMA, HJ ;

AGGUS, JR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :532-535

[9] REVIEW OF STICKING COEFFICIENTS AND SORPTION CAPACITIES OF GASES ON TITANIUM FILMS [J].

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