ON THE ENERGY-DISTRIBUTION OF SPUTTERED ATOMS AT NORMAL ION INCIDENCE

被引：9

作者：

TOLMACHEV, AI

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 93卷 / 04期

关键词：

D O I：

10.1016/0168-583X(94)95628-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The theory developed in a previous paper representing the energy distribution of self-sputtered atoms is now generalized for the case of arbitrary ratios of atom to ion masses. The result is obtained by the Chandrasekhar method of approximate solution of the Boltzmann equation which seems to be a more suitable instrument for the problem than the usually applied method of angular moments. The analysis is performed for the Lindhard scattering cross section and is valid in a wide range of ion energies.

引用

页码：415 / 420

页数：6

共 25 条

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