EFFECTIVE DISTRIBUTION COEFFICIENT OF SILICON DOPANTS DURING MAGNETIC CZOCHRALSKI GROWTH

被引:13
作者
SERIES, RW
HURLE, DTJ
BARRACLOUGH, KG
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D O I
10.1093/imamat/35.2.195
中图分类号
O29 [应用数学];
学科分类号
070104 ;
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页码:195 / 203
页数:9
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