SPATIAL-RESOLUTION IN SELECTED-AREA EELS

被引：10

作者：

SCHENNER, M

SCHATTSCHNEIDER, P

机构：

[1] Institut für Angewandte und Technische Physik, Technische Universität Wien, A-1040 Wien

来源：

ULTRAMICROSCOPY | 1994年 / 55卷 / 01期

关键词：

D O I：

10.1016/0304-3991(94)90078-7

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We investigate the effect of objective-lens chromatic aberration on quantitative chemical microanalysis using electron energy-loss spectrometry in the electron microscope. Experimental tests were done on a specimen with a planar interface under the condition of a rather large chromatic error in image mode. We discuss three different models of image formation with inelastically scattered electrons. Simulations for Ni show that the quantum-mechanical image theory for large defocus values is practically equivalent to a Lorentzian image distribution and describes the experimental data satisfactorily. A method to obtain a proper defocus setting for the compensation of the chromatic error is also presented.

引用

页码：31 / 41

页数：11

共 21 条

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PRESS WH, 1988, VETTERLING NUMBER RE

[12]

ROSE H, 1976, OPTIK, V45, P139

[13]

ROSE H, 1976, OPTIK, V45, P187

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