A COMPARISON OF TIN FILMS PRODUCED BY REACTIVE DC SPUTTERING AND ION-ASSISTED DEPOSITION

被引：18

作者：

BIELI, AV ^{[1
]}

KHEYRANDISH, H ^{[1
]}

COLLIGON, JS ^{[1
]}

机构：

[1] ACAD SCI BESSR,INST PHYS TECH,MINSK 220730,BELORUSSIA,USSR

来源：

THIN SOLID FILMS | 1991年 / 200卷 / 02期

关键词：

D O I：

10.1016/0040-6090(91)90200-H

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The properties of TiN films produced by reactive d.c. sputtering have been compared with those formed by deposition during irradiation by 10 keV nitrogen ions. Films were deposited on aluminium, nickel, molybdenum, silicon and titanium substrates which were chosen because they have a range of mechanical properties. The composition of the films has been studied by Rutherford backscattering, nuclear reaction analysis and transmission electron microscopy and data concerning their hardness and adhesion are also presented. It was found that the films produced by ion-assisted deposition (IAD) were nearly stoichiometric TiN with a predominant (100) orientation while the reactively sputtered films were less crystalline and contained a significant amount of oxygen and carbon throughout the film. There was also considerable improvement in the adhesion of the IAD films but their hardness was only marginally improved.

引用

页码：283 / 291

页数：9

共 18 条

[1] THEORY OF THIN-FILM ORIENTATION BY ION-BOMBARDMENT DURING DEPOSITION [J].

BRADLEY, RM ;

HARPER, JME ;

SMITH, DA .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) :4160-4164

[2]

Buckley D H., 1981, SURFACE EFFECTS ADHE

[3]

CARTER G, 1986, VACUUM, V35, P337

[4] SURFACE MODIFICATION BY ION-BEAMS [J].

COLLIGON, JS .

VACUUM, 1986, 36 (7-9) :413-418

[5] ION-IMPLANTATION AND ION ASSISTED COATING OF METALS [J].

DEARNALEY, G ;

GOODE, PD ;

MINTER, FJ ;

PEACOCK, AT ;

WADDELL, CN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2684-2689

[6] 2-GUN ION-BEAM SYSTEM FOR DYNAMIC RECOIL IMPLANTATION [J].

FISCHER, G ;

HILL, AE ;

COLLIGON, JS .

VACUUM, 1978, 28 (6-7) :277-281

[7]

GOLDSCHMIDT HJ, 1967, INTERSTITIAL ALLOYS, P632

[8] MATERIAL SELECTION FOR HARD COATINGS [J].

HOLLECK, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2661-2669

[9] Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition [J].

Johansson, B. O. ;

Hentzell, H. T. G. ;

Harper, J. M. E. ;

Cuomo, J. J. .

JOURNAL OF MATERIALS RESEARCH, 1986, 1 (03) :442-451

[10] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

KANT, RA ;

SARTWELL, BD ;

SINGER, IL ;

VARDIMAN, RG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :915-919

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