A NEW EFFUSION CELL ARRANGEMENT FOR FAST AND ACCURATE CONTROL OF MATERIAL EVAPORATION UNDER VACUUM CONDITIONS

被引：5

作者：

BECK, A

JUNGEN, H

BULLEMER, B

EISELE, I

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 01期

关键词：

D O I：

10.1116/1.572626

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：5 / 8

页数：4

共 5 条

[1] ON THE USE OF DOWNWARD-LOOKING SOURCES IN MBE SYSTEMS [J].

COLLINS, DM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02) :250-251

[2] A SIMPLE SOURCE CELL DESIGN FOR MBE [J].

KUBIAK, RA ;

DRISCOLL, P ;

PARKER, EHC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02) :252-253

KUNZEL, H ;

KNECHT, J ;

JUNG, H ;

WUNSTEL, K ;

PLOOG, K .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 28 (03) :167-173

[4] MOLECULAR-BEAM SOURCE FOR HIGH VAPOR-PRESSURE MATERIALS [J].

MYERS, TH ;

SCHETZINA, JF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02) :134-136

[5] FILM THICKNESS DISTRIBUTION AT OBLIQUE EVAPORATION [J].

SVENSSON, SP ;

ANDERSSON, TG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02) :245-247