CHARACTERIZATION OF MULTILAYERED TUNGSTEN CARBON THIN-FILMS BY VARIOUS PROCESSES

被引：1

作者：

RENUCCI, P

PETRAKIAN, JP

GAUDART, L

ROUX, D

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.339978

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1191 / 1195

页数：5

共 12 条

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