THEORETICAL-ANALYSIS OF AES DEPTH PROFILING IN MULTILAYERS - APPLICATION TO C/W MULTILAYERS

被引：6

作者：

PETRAKIAN, JP

RENUCCI, P

机构：

来源：

SURFACE SCIENCE | 1987年 / 186卷 / 03期

关键词：

D O I：

10.1016/S0039-6028(87)80386-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：447 / 459

页数：13

共 12 条

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[6] ON THE EVALUATION OF DEPTH RESOLUTION FROM DEPTH PROFILES OF MULTILAYERS - COMMENT ON MULTIPLE POINT DEPTH PROFILING OF MULTILAYER CR-NI THIN-FILM STRUCTURES DEPOSITED ON A ROUGH SUBSTRATE USING SCANNING AUGER MICROSCOPY [J].

MARTON, D ;

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THIN SOLID FILMS, 1986, 136 (01) :L23-L26

[7] INFLUENCE OF ION-BOMBARDMENT ON DEPTH RESOLUTION IN AUGER-ELECTRON SPECTROSCOPY ANALYSIS OF THIN GOLD-FILMS ON NICKEL [J].

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[8] A STUDY OF INTER-DIFFUSION IN MULTILAYER CU/NI FILMS BY AUGER-ELECTRON DEPTH PROFILING [J].

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THIN SOLID FILMS, 1982, 89 (02) :221-224

[9] AES SPUTTERING DEPTH PROFILE ANALYSIS OF C/W LAYERED SYNTHETIC MICROSTRUCTURES [J].

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APPLIED SURFACE SCIENCE, 1987, 28 (02) :93-102

[10]

VIDAL B, COMMUNICATION

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