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ON THE EVALUATION OF DEPTH RESOLUTION FROM DEPTH PROFILES OF MULTILAYERS - COMMENT ON MULTIPLE POINT DEPTH PROFILING OF MULTILAYER CR-NI THIN-FILM STRUCTURES DEPOSITED ON A ROUGH SUBSTRATE USING SCANNING AUGER MICROSCOPY

被引：2
作者：
MARTON, D
LASZLO, J
机构：
来源：
THIN SOLID FILMS | 1986年 / 136卷 / 01期
关键词：
D O I：
10.1016/0040-6090(86)90119-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L23 / L26
页数：4
相关论文
共 7 条
[1]   DEPTH RESOLUTION IN ION SPUTTERING - AN ASPECT OF QUANTITATIVE MICROANALYSIS [J].
GIBER, J ;
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JOURNAL DE PHYSIQUE, 1984, 45 (NC-2) :115-118
[2]   DEPTH RESOLUTION AND SURFACE-ROUGHNESS EFFECTS IN SPUTTER PROFILING OF NICR MULTILAYER SANDWICH SAMPLES USING AUGER-ELECTRON SPECTROSCOPY [J].
HOFMANN, S ;
ERLEWEIN, J ;
ZALAR, A .
THIN SOLID FILMS, 1977, 43 (03) :275-283
[3]  
Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406
[4]  
KIRSCHNER J, 1984, TOPICS CURRENT PHYSI, V37, P103
[5]  
MARTON D, VACUUM
[6]   MULTIPLE-POINT DEPTH PROFILING OF MULTILAYER CR/NI THIN-FILM STRUCTURES ON A ROUGH SUBSTRATE USING SCANNING AUGER MICROSCOPY [J].
ZALAR, A ;
HOFMANN, S ;
ZABKAR, A .
THIN SOLID FILMS, 1985, 131 (1-2) :149-154
[7]  
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