DEPTH RESOLUTION AND SURFACE-ROUGHNESS EFFECTS IN SPUTTER PROFILING OF NICR MULTILAYER SANDWICH SAMPLES USING AUGER-ELECTRON SPECTROSCOPY

被引：92

作者：

HOFMANN, S

ERLEWEIN, J

ZALAR, A

机构：

[1] MAX PLANCK INST MET FORSCH,INST WERKSTOFFWISSENSCH,STUTTGART,FED REP GER

[2] INST ELECTR & VACUUM TECH,LJUBLJANA,YUGOSLAVIA

来源：

关键词：

D O I：

10.1016/0040-6090(77)90289-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：275 / 283

页数：9

共 21 条

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[5] CORRELATION BETWEEN ELECTRICAL-PROPERTIES AND AES CONCENTRATION-DEPTH PROFILES OF NICR THIN-FILMS
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ZALAR, A
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[7] DEPTH RESOLUTION IN SPUTTER PROFILING
HOFMANN, S
[J]. APPLIED PHYSICS, 1977, 13 (02): : 205 - 207
[8] HOFMANN S, TO BE PUBLISHED
[9] HOFMANN S, 1974, Z METALLKDE, V65, P721
[10] HOFMANN S, 1977, MIKROCHIM ACTA S, V7, P185