DEPTH RESOLUTION IN ION SPUTTERING - AN ASPECT OF QUANTITATIVE MICROANALYSIS

被引：12

作者：

GIBER, J

MARTON, D

LASZLO, J

机构：

来源：

JOURNAL DE PHYSIQUE | 1984年 / 45卷 / NC-2期

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D O I：

10.1051/jphyscol:1984226

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页码：115 / 118

页数：4

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