DEPTH RESOLUTION IN COMPOSITION PROFILES BY ION SPUTTERING AND SURFACE-ANALYSIS FOR SINGLE-LAYER AND MULTILAYER STRUCTURES ON REAL SUBSTRATES

被引：75

作者：

SEAH, MP

LEA, C

机构：

来源：

THIN SOLID FILMS | 1981年 / 81卷 / 03期

关键词：

D O I：

10.1016/0040-6090(81)90488-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：257 / 270

页数：14

相关论文

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