DEPTH RESOLUTION IN COMPOSITION PROFILES BY ION SPUTTERING AND SURFACE-ANALYSIS FOR SINGLE-LAYER AND MULTILAYER STRUCTURES ON REAL SUBSTRATES

被引：75

作者：

SEAH, MP

LEA, C

机构：

来源：

THIN SOLID FILMS | 1981年 / 81卷 / 03期

关键词：

D O I：

10.1016/0040-6090(81)90488-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：257 / 270

页数：14

相关论文

共 28 条

[21] DETERMINATION OF THE DEPTH RESOLUTION IN AUGER DEPTH PROFILING MEASUREMENTS
ROLL, K
HAMMER, C
[J]. THIN SOLID FILMS, 1979, 57 (02) : 209 - 212
[22] Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103
[23] PURE ELEMENT SPUTTERING YIELDS USING 500-1000 EV ARGON IONS
SEAH, MP
[J]. THIN SOLID FILMS, 1981, 81 (03) : 279 - 287
[24] THE STATISTICAL SPUTTERING CONTRIBUTION TO RESOLUTION IN CONCENTRATION-DEPTH PROFILES
SEAH, MP
SANZ, JM
HOFMANN, S
[J]. THIN SOLID FILMS, 1981, 81 (03) : 239 - 246
[25] EVALUATION OF CONCENTRATION-DEPTH PROFILES BY SPUTTERING IN SIMS AND AES - COMMENT
SHIMIZU, R
[J]. APPLIED PHYSICS, 1979, 18 (04): : 425 - 426
[26] SIGMUND P, 1969, PHYS REV, V187, P768, DOI 10.1103/PhysRev.187.768
[27] WERNER HW, 1977, MIKROCHIMICA ACTA S, V7, P63
[28] DEPTH RESOLUTION IN SPUTTER PROFILING - EVIDENCE AGAINST SEQUENTIAL LAYER SPUTTERING MODEL
WITTMAACK, K
SCHULZ, F
[J]. THIN SOLID FILMS, 1978, 52 (02) : 259 - 270