DEPTH RESOLUTION IN SPUTTER PROFILING - EVIDENCE AGAINST SEQUENTIAL LAYER SPUTTERING MODEL

被引：24

作者：

WITTMAACK, K

SCHULZ, F

机构：

来源：

THIN SOLID FILMS | 1978年 / 52卷 / 02期

关键词：

D O I：

10.1016/0040-6090(78)90144-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：259 / 270

页数：12

共 21 条

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[8]

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