ON THE EVALUATION OF DEPTH RESOLUTION FROM DEPTH PROFILES OF MULTILAYERS - COMMENT MULTIPLE POINT DEPTH PROFILING OF MULTILAYER CR/NI THIN-FILM STRUCTURES DEPOSITED ON A ROUGH SUBSTRATE USING SCANNING AUGER MICROSCOPY - REPLY

被引：1

作者：

HOFMANN, S

机构：

来源：

THIN SOLID FILMS | 1986年 / 136卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90120-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L27 / L29

页数：3

共 14 条

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[8]

HOFMANN S, UNPUB

[9]

MARTON D, 1986, THIN SOLID FILMS, V135, pL23

[10] DEPTH RESOLUTION IN COMPOSITION PROFILES BY ION SPUTTERING AND SURFACE-ANALYSIS FOR SINGLE-LAYER AND MULTILAYER STRUCTURES ON REAL SUBSTRATES [J].

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