MICROPROCESSOR BASED CONTROL OF AN ION-BEAM DEPOSITION SYSTEM

被引：1

作者：

AHN, J

STROMSMOE, KA

LAWSON, RPW

机构：

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS | 1985年 / 32卷 / 04期

关键词：

D O I：

10.1109/TIE.1985.350117

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：405 / 409

页数：5

共 9 条

[1]

AHN JS, 1979, THESIS U ALBERTA EDM

[2] THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .2. PB+ ION-BEAM DEPOSITION AND ANALYSIS OF DEPOSITS [J].

AMANO, J ;

LAWSON, RPW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (03) :831-835

[3]

AMANO J, 1977, J VAC SCI TECHNOL, V14, P836, DOI 10.1116/1.569281

[4] THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .1. SYSTEM SPECIFICATION AND DESIGN [J].

AMANO, J ;

BRYCE, P ;

LAWSON, RPW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (02) :591-595

[5] GROWTH OF SINGLE-CRYSTAL METASTABLE SEMICONDUCTING (GASB)1-XGEX FILMS [J].

CADIEN, KC ;

ELTOUKHY, AH ;

GREENE, JE .

APPLIED PHYSICS LETTERS, 1981, 38 (10) :773-775

[6] GROWTH OF METASTABLE CU1-XCRX SOLID-SOLUTIONS BY ION MIXING DURING DEPOSITION [J].

SHIN, SM ;

RAY, MA ;

RIGSBEE, JM ;

GREENE, JE ;

BARNETT, SA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :537-538

[7]

1983, NATIONAL SEMICONDUCT

[8]

1984, ANALOG DEVICE DATA H

[9]

1981, MOTOROLA MICROPROCES

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