共 13 条
[1]
A MODEL FOR COLLISION PROCESSES IN GASES .1. SMALL AMPLITUDE PROCESSES IN CHARGED AND NEUTRAL ONE-COMPONENT SYSTEMS
[J].
PHYSICAL REVIEW,
1954, 94 (03)
:511-525
[2]
BOSWELL RW, 1984, PLASMA PHYS CONTR F, V26, P1147, DOI 10.1088/0741-3335/26/10/001
[4]
CHEN FF, 1987, 1987 P INT C PLASM P, V2, P1378
[6]
HELICON WAVES AND EFFICIENT PLASMA PRODUCTION
[J].
PHYSICS OF FLUIDS B-PLASMA PHYSICS,
1991, 3 (04)
:893-898
[10]
OPTIMIZED MICROWAVE COUPLING IN AN ELECTRON-CYCLOTRON RESONANCE ETCH TOOL
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (03)
:696-701