ELECTRICAL-PROPERTIES OF STACKING-FAULTS AND PRECIPITATES IN HEAT-TREATED DISLOCATION-FREE CZOCHRALSKI SILICON

被引：79

作者：

KIMERLING, LC ^{[1
]}

LEAMY, HJ ^{[1
]}

PATEL, JR ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 05期

关键词：

D O I：

10.1063/1.89355

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：217 / 219

页数：3

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