GENERATION ANNEALING KINETICS OF INTERFACE STATES ON OXIDIZED SILICON ACTIVATED BY 10.2-EV PHOTOHOLE INJECTION

被引:67
作者
SAH, CT [1 ]
SUN, JYC [1 ]
TZOU, JJT [1 ]
机构
[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801
关键词
D O I
10.1063/1.330443
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:8886 / 8893
页数:8
相关论文
共 39 条
[1]   1 MU-M MOSFET VLSI TECHNOLOGY .8. RADIATION EFFECTS [J].
AITKEN, JM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (04) :372-379
[2]   ELECTRON TRAPPING BY RADIATION-INDUCED CHARGE IN MOS DEVICES [J].
AITKEN, JM ;
YOUNG, DR .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (03) :1196-1198
[3]   AVALANCHE INJECTION OF HOLES INTO SIO2 [J].
AITKEN, JM ;
YOUNG, DR .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1977, 24 (06) :2128-2134
[4]  
CRAVEN RA, 1981 INT EL DEV M, P228
[5]   THE EFFECTS OF WATER ON OXIDE AND INTERFACE TRAPPED CHARGE GENERATION IN THERMAL SIO2-FILMS [J].
FEIGL, FJ ;
YOUNG, DR ;
DIMARIA, DJ ;
LAI, S ;
CALISE, J .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (09) :5665-5682
[6]   IDENTIFICATION OF ELECTRON TRAPS IN THERMAL SILICON DIOXIDE FILMS [J].
HARTSTEIN, A ;
YOUNG, DR .
APPLIED PHYSICS LETTERS, 1981, 38 (08) :631-633
[7]  
JOHNSON NM, 1980, PHYSICS MOS INSULATO, P531
[8]   OXYGEN-RELATED DONOR STATES IN SILICON [J].
KIMERLING, LC ;
BENTON, JL .
APPLIED PHYSICS LETTERS, 1981, 39 (05) :410-412
[10]   REDUCTION OF ELECTRON TRAPPING IN SILICON DIOXIDE BY HIGH-TEMPERATURE NITROGEN ANNEAL [J].
LAI, SK ;
YOUNG, DR ;
CALISE, JA ;
FEIGL, FJ .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (09) :5691-5695