DEPTH DISTRIBUTIONS OF SILVER IONS IMPLANTED IN SI AND SIO2

[1] BRICE DK, 1971, RADIAT EFF, V11, P227

[2] RANGE DISTRIBUTION OF IMPLANTED IONS IN SIO2, SI3N4, AND AL2O3 [J]. APPLIED PHYSICS LETTERS, 1973, 22 (10) : 490 - 492

[3] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[4] Eisen F.H., 1972, RADIAT EFF, V13, P93, DOI [10.1080/00337577208231165, DOI 10.1080/00337577208231165]

[5] JESPERSGARD P, 1967, CAN J PHYS, V45, P2893

[6] USE OF NUCLEAR-REACTION O-16(D,ALPHA)N-14 IN MICROANALYSIS OF OXIDE SURFACE-LAYERS [J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 111 (03): : 605 - 610

[7] Turos A., 1968, Nukleonika, V13, P975

[8] TUROS A, 1969, NUKEONIKA, V14, P320

[9] STOPPING OF HE-4 IONS IN ELEMENTAL MATTER [J]. THIN SOLID FILMS, 1973, 19 (02) : 281 - 287

[1] BRICE DK, 1971, RADIAT EFF, V11, P227

[2] RANGE DISTRIBUTION OF IMPLANTED IONS IN SIO2, SI3N4, AND AL2O3 [J]. APPLIED PHYSICS LETTERS, 1973, 22 (10) : 490 - 492

[3] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[4] Eisen F.H., 1972, RADIAT EFF, V13, P93, DOI [10.1080/00337577208231165, DOI 10.1080/00337577208231165]

[5] JESPERSGARD P, 1967, CAN J PHYS, V45, P2893

[6] USE OF NUCLEAR-REACTION O-16(D,ALPHA)N-14 IN MICROANALYSIS OF OXIDE SURFACE-LAYERS [J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 111 (03): : 605 - 610

[7] Turos A., 1968, Nukleonika, V13, P975

[8] TUROS A, 1969, NUKEONIKA, V14, P320

[9] STOPPING OF HE-4 IONS IN ELEMENTAL MATTER [J]. THIN SOLID FILMS, 1973, 19 (02) : 281 - 287