MODELING AND DYNAMIC CHARACTERIZATION OF THE CZOCHRALSKI CRYSTAL-GROWTH PROCESS

被引：2

作者：

GEVELBER, MA ^{[1
]}

STEPHANOPOULOS, G ^{[1
]}

机构：

[1] MIT,DEPT CHEM ENGN,CAMBRIDGE,MA 02139

来源：

JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME | 1993年 / 115卷 / 01期

关键词：

D O I：

10.1115/1.2897384

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.

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页码：109 / 114

页数：6

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