THE OXIDATION OF SILICON IN DRY OXYGEN, WET OXYGEN, AND STEAM

被引：156

作者：

DEAL, BE

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1963年 / 110卷 / 06期

关键词：

D O I：

10.1149/1.2425807

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：527 / 533

页数：7

共 20 条

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