THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN SPUTTER PROFILING

[1] ELEMENTAL COMPOSITION PROFILING IN THIN-FILMS BY GLOW-DISCHARGE MASS-SPECTROMETRY - DEPTH RESOLUTION [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) : 2828 - 2830

[2] EVALUATION OF CONCENTRATION-DEPTH PROFILES BY SPUTTERING IN SIMS AND AES [J]. APPLIED PHYSICS, 1976, 9 (01): : 59 - 66

[3] Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406

[4] HONIG RE, 1979, 26TH P ANN C MASS SP, P207

[5] OPTIMIZED DEPTH RESOLUTION IN ION-SPUTTERED AND LAPPED COMPOSITIONAL PROFILES WITH AUGER-ELECTRON SPECTROSCOPY [J]. THIN SOLID FILMS, 1981, 75 (01) : 67 - 86

[6] LEE YW, 1960, STATISTICAL THEORY C, P43

[7] MAGEE CW, 1980, COMMUNICATION

[8] THEORETICAL AND EXPERIMENTAL ASPECTS OF SECONDARY ION MASS-SPECTROMETRY [J]. VACUUM, 1974, 24 (10) : 493 - 504

[9] WERNER HW, 1977, MIKROCHIMICA ACTA S, V7, P63

[10] WERNER HW, 1969, DEVELOPMENTS APPLI A, V7, P239

[1] ELEMENTAL COMPOSITION PROFILING IN THIN-FILMS BY GLOW-DISCHARGE MASS-SPECTROMETRY - DEPTH RESOLUTION [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) : 2828 - 2830

[2] EVALUATION OF CONCENTRATION-DEPTH PROFILES BY SPUTTERING IN SIMS AND AES [J]. APPLIED PHYSICS, 1976, 9 (01): : 59 - 66

[3] Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406

[4] HONIG RE, 1979, 26TH P ANN C MASS SP, P207

[5] OPTIMIZED DEPTH RESOLUTION IN ION-SPUTTERED AND LAPPED COMPOSITIONAL PROFILES WITH AUGER-ELECTRON SPECTROSCOPY [J]. THIN SOLID FILMS, 1981, 75 (01) : 67 - 86

[6] LEE YW, 1960, STATISTICAL THEORY C, P43

[7] MAGEE CW, 1980, COMMUNICATION

[8] THEORETICAL AND EXPERIMENTAL ASPECTS OF SECONDARY ION MASS-SPECTROMETRY [J]. VACUUM, 1974, 24 (10) : 493 - 504

[9] WERNER HW, 1977, MIKROCHIMICA ACTA S, V7, P63

[10] WERNER HW, 1969, DEVELOPMENTS APPLI A, V7, P239