THE CONSTITUTION OF NITRIDED OXIDES AND REOXIDIZED NITRIDED OXIDES ON SILICON

被引：46

作者：

NAIMAN, ML ^{[1
]}

KIRK, CT ^{[1
]}

EMERSON, BL ^{[1
]}

TAITEL, JB ^{[1
]}

SENTURIA, SD ^{[1
]}

机构：

[1] MIT,CAMBRIDGE,MA 02139

来源：

关键词：

D O I：

10.1063/1.336196

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：779 / 792

页数：14

共 28 条

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