MORPHOLOGY OF PLASMA-POLYMERIZED METHYL-METHACRYLATE FILMS

被引：13

作者：

LI, GF

TOBIN, JA

DENTON, DD

机构：

[1] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin - Madison, Madison, WI 53706

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 05期

关键词：

D O I：

10.1063/1.111103

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The surface morphology of plasma polymerized methyl methacrylate films was investigated using atomic force microscopy. It was found that the plasma polymer surfaces consist of nanometer scale growth columns. The average grain size of the growth columns increases with deposition time. For the same deposition time, the average grain size is proportional to pressure and deposition power. It was deduced that microscopic properties of plasma polymers are not uniform through the bulk of the plasma polymer films even though the external deposition parameters are held constant.

引用

页码：560 / 562

页数：3

共 16 条

[1]

Auciello O, 1989, PLASMA DIAGNOSTICS, V1

[2]

Auciello O, 1989, PLASMA DIAGNOSTICS, V2

[3] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[4] INVESTIGATING POLY(1-BUTENE) FILMS BY SFM STM [J].

ENG, LM ;

FUCHS, H ;

JANDT, KD ;

PETERMANN, J .

ULTRAMICROSCOPY, 1992, 42 :989-997

[5]

HANSMA PK, 1989, SCIENCE, V243, P1586

[6] TOPOGRAPHY AND CORRELATION TO WEAR OF HYDROGENATED AMORPHOUS-CARBON COATINGS - AN ATOMIC FORCE MICROSCOPY STUDY [J].

HEINZELMANN, H ;

MEYER, E ;

SCANDELLA, L ;

GRUTTER, P ;

JUNG, T ;

HUG, H ;

HIDBER, HR ;

GUNTHERODT, HJ ;

SCHMIDT, C .

WEAR, 1989, 135 (01) :109-117

[7] SCANNING FORCE MICROSCOPY OF NANOSTRUCTURED UNIAXIALLY ORIENTED ULTRA THIN-FILM SURFACES OF ISOTACTIC POLYSTYRENE [J].

JANDT, KD ;

ENG, LM ;

PETERMANN, J ;

FUCHS, H .

POLYMER, 1992, 33 (24) :5331-5333

[8] PHOTOLUMINESCENCE OF PLASMA POLYMERIZED METHYL-METHACRYLATE FILMS [J].

LI, GF ;

TOBIN, JA ;

DENTON, DD .

APPLIED PHYSICS LETTERS, 1993, 62 (14) :1582-1584

[9]

LOH KG, 1991, SYNTHETIC MET, V41, P77

[10] ATOMIC FORCE MICROSCOPY ON POLYMERS AND POLYMER RELATED-COMPOUNDS .3. MONOCRYSTALS OF MONOMER AND POLYMER 2,4-HEXADIYNYLENE BIS(PARA-FLUOROBENZENESULFONATE) [J].

MAGONOV, SN ;

BAR, G ;

CANTOW, HJ ;

BAUER, HD ;

MULLER, I ;

SCHWOERER, M .

POLYMER BULLETIN, 1991, 26 (02) :223-230

← 1 2 →