LATERAL RESOLUTION IN THE NEAR-FIELD AND FAR-FIELD PHASE IMAGES OF PI-PHASESHIFTING STRUCTURES

被引:22
作者
TOTZECK, M
KRUMBUGEL, MA
机构
[1] Optisches Institut der Technischen Universität Berlin, 10623 Berlin
关键词
D O I
10.1016/0030-4018(94)00451-X
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The resolution in the phase distribution of coherent images of strong phase objects is investigated using moment method near field calculations and simulated far field images. It is demonstrated that an apparent superresolution for pi-phaseshifts corresponds to a threshold criterion and that the images depend strongly on polarization and refractive index.
引用
收藏
页码:189 / 200
页数:12
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