FUNDAMENTALS OF ION-BEAM-ASSISTED DEPOSITION - TECHNIQUE AND FILM PROPERTIES

被引：58

作者：

HUBLER, GK

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 115卷

关键词：

D O I：

10.1016/0921-5093(89)90677-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：181 / 192

页数：12

共 31 条

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[2] BINARY COLLISION CASCADE PREDICTION OF CRITICAL ION-TO-ATOM ARRIVAL RATIO IN THE PRODUCTION OF THIN-FILMS WITH REDUCED INTRINSIC STRESS
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HUBLER, GK
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (04) : 527 - 533
[3] PROPERTY MODIFICATION AND SYNTHESIS BY LOW-ENERGY PARTICLE BOMBARDMENT CONCURRENT WITH FILM GROWTH
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 963 - 974
[4] ION-BEAM ASSISTED DEPOSITION OF SUBSTOICHIOMETRIC SILICON-NITRIDE
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BRIGHTON, DR
HUBLER, GK
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 983 - 986
[5] DONOVAN EP, IN PRESS J APPL OPT
[6] ION-BEAM-ASSISTED COATINGS FOR CORROSION PROTECTION STUDIES
ENSINGER, W
WOLF, GK
[J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 116 : 1 - 14
[7] GIBSON UJ, 1987, PHYS THIN FILMS, V13, P109
[8] THERMAL-STABILITY OF SILICON-NITRIDE COATINGS PRODUCED BY ION ASSISTED DEPOSITION
GRABOWSKI, KS
KAHN, ADF
DONOVAN, EP
CAROSELLA, CA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) : 190 - 193
[9] A REVIEW OF THE PRESENT UNDERSTANDING OF THE ROLE OF ION SURFACE INTERACTIONS AND PHOTOINDUCED REACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH
GREENE, JE
MOTOOKA, T
SUNDGREN, JE
ROCKETT, A
GORBATKIN, S
LUBBEN, D
BARNETT, SA
[J]. JOURNAL OF CRYSTAL GROWTH, 1986, 79 (1-3) : 19 - 32
[10] THE ROLE OF ION SURFACE INTERACTIONS AND PHOTOINDUCED REACTIONS DURING FILM GROWTH FROM THE VAPOR-PHASE
GREENE, JE
MOTOOKA, T
SUNDGREN, JE
LUBBEN, D
GORBATKIN, S
BARNETT, SA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 27 (01) : 226 - 242

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