THERMAL-STABILITY OF SILICON-NITRIDE COATINGS PRODUCED BY ION ASSISTED DEPOSITION

被引：14

作者：

GRABOWSKI, KS

KAHN, ADF

DONOVAN, EP

CAROSELLA, CA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90769-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：190 / 193

页数：4

相关论文

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