PREPARATION OF A-SIC-H/A-GEC-H SUPERLATTICES BY DUAL MAGNETRON SPUTTERING

被引：11

作者：

SAITO, N

YAMAGUCHI, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 07期

关键词：

D O I：

10.1063/1.344144

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3114 / 3116

页数：3

共 9 条

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[3] Mott N.F., 1979, ELECT PROCESSES NONC, P289
[4] PREPARATION OF A-SI-H/A-SI1-XCX-H SUPERLATTICES
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (08): : 1141 - 1143
[5] INFLUENCE OF SPUTTERING PRESSURE ON THE PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBON ALLOY-FILMS PREPARED BY MAGNETRON SPUTTERING OF SILICON IN METHANE-ARGON GAS-MIXTURES
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[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (07) : 2498 - 2502
[6] INFLUENCE OF RF POWER ON THE PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBON ALLOY-FILMS PREPARED BY MAGNETRON SPUTTERING OF SILICON IN METHANE-ARGON GAS-MIXTURES
SAITO, N
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) : 3504 - 3507
[7] SUPERLATTICE STRUCTURE A-SI FILMS FABRICATED BY THE PHOTO-CVD METHOD AND THEIR APPLICATION TO SOLAR-CELLS
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (01): : 28 - 32
[8] INTERFACIAL OPTICAL-ABSORPTION IN TIO2-SIO2 MULTILAYER COATINGS PREPARED BY RF MAGNETRON SPUTTERING
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[J]. APPLIED OPTICS, 1986, 25 (16): : 2703 - 2706
[9] INFLUENCE OF A-SINX-H COMPOSITION ON TRANSFER-DOPING AND ELECTRON-TRAPPING EFFECTS IN A-SINX-H/A-SI-H SUPERLATTICES
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YANAGISAWA, S
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (03): : 409 - 416

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