INFLUENCE OF SPUTTERING PRESSURE ON THE PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBON ALLOY-FILMS PREPARED BY MAGNETRON SPUTTERING OF SILICON IN METHANE-ARGON GAS-MIXTURES

被引：20

作者：

SAITO, N

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 07期

关键词：

D O I：

10.1063/1.336995

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2498 / 2502

页数：5

共 23 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS SILICON-CARBIDE, SILICON-NITRIDE AND GERMANIUM CARBIDE PREPARED BY GLOW-DISCHARGE TECHNIQUE [J].

ANDERSON, DA ;

SPEAR, WE .

PHILOSOPHICAL MAGAZINE, 1977, 35 (01) :1-16

[2] ELECTRONIC AND OPTICAL-PROPERTIES OF GLOW-DISCHARGE AMORPHOUS-SILICON CARBON ALLOYS [J].

BULLOT, J ;

GAUTHIER, M ;

SCHMIDT, M ;

CATHERINE, Y ;

ZAMOUCHE, A .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 49 (05) :489-501

[3] REACTIVE PLASMA DEPOSITED SIXCYHZ FILMS [J].

CATHERINE, Y ;

TURBAN, G .

THIN SOLID FILMS, 1979, 60 (02) :193-200

[4] PROPERTIES OF UNDOPED AND PARA-TYPE HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS [J].

CHAUDHURI, P ;

RAY, S ;

BATABYAL, AK ;

BARUA, AK .

THIN SOLID FILMS, 1984, 121 (03) :233-246

[5] AMORPHOUS HYDROGENATED SIC FROM A LOW-POWER DISCHARGE OF SIH4-C2H2 MIXTURE [J].

ICHIMURA, T ;

UCHIDA, Y ;

YAMADA, K ;

OHSAWA, M ;

ISHIDA, S .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :557-560

[6] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J].

LUCOVSKY, G .

SOLID STATE COMMUNICATIONS, 1979, 29 (08) :571-576

[7]

LUCOVSKY G, 1984, PHYSICS HYDROGENATED, V2, P333

[8] DEFECTS IN HYDROGENATED AMORPHOUS SILICON-CARBON ALLOY-FILMS PREPARED BY GLOW-DISCHARGE DECOMPOSITION AND SPUTTERING [J].

MORIMOTO, A ;

MIURA, T ;

KUMEDA, M ;

SHIMIZU, T .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) :7299-7305

[9]

Mott N.F., 1979, ELECT PROCESSES NONC, P289

[10] INFLUENCE OF DEPOSITION CONDITIONS ON SPUTTER-DEPOSITED AMORPHOUS SILICON [J].

PAWLEWICZ, WT .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) :5595-5601

← 1 2 3 →