AMORPHOUS HYDROGENATED SIC FROM A LOW-POWER DISCHARGE OF SIH4-C2H2 MIXTURE

被引：17

作者：

ICHIMURA, T

UCHIDA, Y

YAMADA, K

OHSAWA, M

ISHIDA, S

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1983年 / 59-6卷 / DEC期

关键词：

D O I：

10.1016/0022-3093(83)90644-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：557 / 560

页数：4

共 8 条

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