DEFECTS IN HYDROGENATED AMORPHOUS SILICON-CARBON ALLOY-FILMS PREPARED BY GLOW-DISCHARGE DECOMPOSITION AND SPUTTERING

被引：139

作者：

MORIMOTO, A

MIURA, T

KUMEDA, M

SHIMIZU, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 11期

关键词：

D O I：

10.1063/1.329879

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：7299 / 7305

页数：7

共 17 条

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