KINETIC ROUGHENING OF VICINAL SI(001)

被引：11

作者：

HEGEMAN, PE ^{[1
]}

ZANDVLIET, HJW ^{[1
]}

KIP, GAM ^{[1
]}

VANSILFHOUT, A ^{[1
]}

机构：

[1] UNIV TWENTE,FAC APPL PHYS,POB 217,7500 AE ENSCHEDE,NETHERLANDS

来源：

SURFACE SCIENCE | 1994年 / 311卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(94)90468-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The kinetic roughening behavior of vicinal Si(001) surfaces is studied with scanning tunneling microscopy. By analyzing the height-height correlation function of the Si layers that have been grown we found, in the case of islands growth, an algebraic roughening behavior with a roughness exponent of 0.68 +/- 0.05. In the step flow mode, however, we found non-algebraic roughening behavior.

引用

页码：L655 / L660

页数：6

共 32 条

[1] NUMERICAL-SOLUTION OF A CONTINUUM EQUATION FOR INTERFACE GROWTH IN 2+1 DIMENSIONS [J].

AMAR, JG ;

FAMILY, F .

PHYSICAL REVIEW A, 1990, 41 (06) :3399-3402

[2] THE SURFACE STATISTICS OF A GRANULAR AGGREGATE [J].

EDWARDS, SF ;

WILKINSON, DR .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1982, 381 (1780) :17-31

[3] SUBMICRON-SCALE SURFACE ROUGHENING INDUCED BY ION-BOMBARDMENT [J].

EKLUND, EA ;

BRUINSMA, R ;

RUDNICK, J ;

WILLIAMS, RS .

PHYSICAL REVIEW LETTERS, 1991, 67 (13) :1759-1762

[4] SCALING OF THE ACTIVE ZONE IN THE EDEN PROCESS ON PERCOLATION NETWORKS AND THE BALLISTIC DEPOSITION MODEL [J].

FAMILY, F ;

VICSEK, T .

JOURNAL OF PHYSICS A-MATHEMATICAL AND GENERAL, 1985, 18 (02) :L75-L81

[5] SCALING OF ROUGH SURFACES - EFFECTS OF SURFACE-DIFFUSION [J].

FAMILY, F .

JOURNAL OF PHYSICS A-MATHEMATICAL AND GENERAL, 1986, 19 (08) :L441-L446

[6]

FEREYDOON F, 1991, DYNAMICS FRACTAL SUR

[7] SURFACE ROUGHENING IN A HYPERCUBE-STACKING MODEL [J].

FORREST, BM ;

TANG, LH .

PHYSICAL REVIEW LETTERS, 1990, 64 (12) :1405-1408

[8] SCANNING TUNNELING MICROSCOPY STUDY OF INITIAL-STAGES OF SILICON MOLECULAR-BEAM EPITAXY [J].

HOEVEN, AJ ;

DIJKKAMP, D ;

LENSSINCK, JM ;

VANLOENEN, EJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (05) :3657-3661

[9] ISLAND AND STEP STRUCTURES ON MOLECULAR-BEAM EPITAXY GROWN SI(001) SURFACES [J].

HOEVEN, AJ ;

DIJKKAMP, D ;

VANLOENEN, EJ ;

LENSSINCK, JM ;

DIELEMAN, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01) :207-209

[10] SCANNING-TUNNELING-MICROSCOPY STUDY OF SINGLE-DOMAIN SI(001) SURFACES GROWN BY MOLECULAR-BEAM EPITAXY [J].

HOEVEN, AJ ;

LENSSINCK, JM ;

DIJKKAMP, D ;

VANLOENEN, EJ ;

DIELEMAN, J .

PHYSICAL REVIEW LETTERS, 1989, 63 (17) :1830-1832

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