KINETIC ROUGHENING OF VICINAL SI(001)

被引:11
作者
HEGEMAN, PE [1 ]
ZANDVLIET, HJW [1 ]
KIP, GAM [1 ]
VANSILFHOUT, A [1 ]
机构
[1] UNIV TWENTE,FAC APPL PHYS,POB 217,7500 AE ENSCHEDE,NETHERLANDS
关键词
D O I
10.1016/0039-6028(94)90468-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The kinetic roughening behavior of vicinal Si(001) surfaces is studied with scanning tunneling microscopy. By analyzing the height-height correlation function of the Si layers that have been grown we found, in the case of islands growth, an algebraic roughening behavior with a roughness exponent of 0.68 +/- 0.05. In the step flow mode, however, we found non-algebraic roughening behavior.
引用
收藏
页码:L655 / L660
页数:6
相关论文
共 32 条
[1]   NUMERICAL-SOLUTION OF A CONTINUUM EQUATION FOR INTERFACE GROWTH IN 2+1 DIMENSIONS [J].
AMAR, JG ;
FAMILY, F .
PHYSICAL REVIEW A, 1990, 41 (06) :3399-3402
[2]   THE SURFACE STATISTICS OF A GRANULAR AGGREGATE [J].
EDWARDS, SF ;
WILKINSON, DR .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1982, 381 (1780) :17-31
[3]   SUBMICRON-SCALE SURFACE ROUGHENING INDUCED BY ION-BOMBARDMENT [J].
EKLUND, EA ;
BRUINSMA, R ;
RUDNICK, J ;
WILLIAMS, RS .
PHYSICAL REVIEW LETTERS, 1991, 67 (13) :1759-1762
[4]   SCALING OF THE ACTIVE ZONE IN THE EDEN PROCESS ON PERCOLATION NETWORKS AND THE BALLISTIC DEPOSITION MODEL [J].
FAMILY, F ;
VICSEK, T .
JOURNAL OF PHYSICS A-MATHEMATICAL AND GENERAL, 1985, 18 (02) :L75-L81
[5]   SCALING OF ROUGH SURFACES - EFFECTS OF SURFACE-DIFFUSION [J].
FAMILY, F .
JOURNAL OF PHYSICS A-MATHEMATICAL AND GENERAL, 1986, 19 (08) :L441-L446
[6]  
FEREYDOON F, 1991, DYNAMICS FRACTAL SUR
[7]   SURFACE ROUGHENING IN A HYPERCUBE-STACKING MODEL [J].
FORREST, BM ;
TANG, LH .
PHYSICAL REVIEW LETTERS, 1990, 64 (12) :1405-1408
[8]   SCANNING TUNNELING MICROSCOPY STUDY OF INITIAL-STAGES OF SILICON MOLECULAR-BEAM EPITAXY [J].
HOEVEN, AJ ;
DIJKKAMP, D ;
LENSSINCK, JM ;
VANLOENEN, EJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (05) :3657-3661
[9]   ISLAND AND STEP STRUCTURES ON MOLECULAR-BEAM EPITAXY GROWN SI(001) SURFACES [J].
HOEVEN, AJ ;
DIJKKAMP, D ;
VANLOENEN, EJ ;
LENSSINCK, JM ;
DIELEMAN, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01) :207-209
[10]   SCANNING-TUNNELING-MICROSCOPY STUDY OF SINGLE-DOMAIN SI(001) SURFACES GROWN BY MOLECULAR-BEAM EPITAXY [J].
HOEVEN, AJ ;
LENSSINCK, JM ;
DIJKKAMP, D ;
VANLOENEN, EJ ;
DIELEMAN, J .
PHYSICAL REVIEW LETTERS, 1989, 63 (17) :1830-1832