ON THE VALIDITY OF A THERMAL SPIKE MIXING MODEL FOR LOW-Z METALS

被引：15

作者：

BORGESEN, P ^{[1
]}

LILENFELD, DA ^{[1
]}

JOHNSON, HH ^{[1
]}

ALFORD, TL ^{[1
]}

WISTROM, RE ^{[1
]}

机构：

[1] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 68卷 / 03期

关键词：

D O I：

10.1063/1.346685

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Low temperature ion beam mixing rates for Cu-Ti, Ni-Ti, and Fe-Ti layers have been found to be significantly lower than predicted by a popular semi-empirical thermal spike model. It has been proposed that the unavoidable hydrogen contamination of the as-deposited Ti films may have reduced the mixing rates, but the measurement of even lower mixing rates for Fe-V and Fe-Co bilayers shows the discrepancy to be more fundamental. Still, a systematic dependence on heat of mixing suggests that some sort of diffusional (thermal spike?) mechanism is involved.

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页码：1364 / 1366

页数：3

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