CHARACTERIZATION OF MULTILAYER DIFFUSION-BARRIERS BY ELECTRON-PROBE MICROANALYSIS AND AUGER-ELECTRON SPECTROSCOPY

被引：5

作者：

BIERLEIN, JC ^{[1
]}

GAARENSTROOM, SW ^{[1
]}

WALDO, RA ^{[1
]}

OTTOLINI, AC ^{[1
]}

机构：

[1] GM CORP,RES LABS,DEPT ANALYT CHEM,WARREN,MI 48090

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572679

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：1102 / 1107

页数：6

相关论文

共 13 条

[1] BIERLEIN JC, 1975, SCI AM JUL, P50
[2] BIERLEIN JC, 1979, P NATIONAL C POWER T, V6
[3] BIERLEIN JC, 1983, SAE830064 TECHN PAP
[4] INFLUENCE OF ION SPUTTERING ON THE ELEMENTAL ANALYSIS OF SOLID-SURFACES
COBURN, JW
[J]. THIN SOLID FILMS, 1979, 64 (03) : 371 - 382
[5] COTTON FA, 1972, ADV INORGANIC CHEM, P68
[6] DAVIS LE, 1976, HDB AUGER ELECTRON S
[7] EFFECT OF ION SPUTTERING ON THE SURFACE-COMPOSITION OF TIN-LEAD ALLOYS
FRANKENTHAL, RP
SICONOLFI, DJ
[J]. SURFACE SCIENCE, 1981, 104 (01) : 205 - 211
[8] THERMAL EFFECTS IN SPUTTERING
KELLY, R
[J]. SURFACE SCIENCE, 1979, 90 (02) : 280 - 318
[9] PURE ELEMENT SPUTTERING YIELDS USING 500-1000 EV ARGON IONS
SEAH, MP
[J]. THIN SOLID FILMS, 1981, 81 (03) : 279 - 287
[10] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY
SEAH, MP
HUNT, CP
[J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) : 33 - 37